JPS63140622U - - Google Patents
Info
- Publication number
- JPS63140622U JPS63140622U JP3343887U JP3343887U JPS63140622U JP S63140622 U JPS63140622 U JP S63140622U JP 3343887 U JP3343887 U JP 3343887U JP 3343887 U JP3343887 U JP 3343887U JP S63140622 U JPS63140622 U JP S63140622U
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- furnace core
- semiconductor manufacturing
- openings
- furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3343887U JPS63140622U (en]) | 1987-03-06 | 1987-03-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3343887U JPS63140622U (en]) | 1987-03-06 | 1987-03-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63140622U true JPS63140622U (en]) | 1988-09-16 |
Family
ID=30841050
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3343887U Pending JPS63140622U (en]) | 1987-03-06 | 1987-03-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63140622U (en]) |
-
1987
- 1987-03-06 JP JP3343887U patent/JPS63140622U/ja active Pending